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> Transactions of the Institute of Electrical Engineering of Japan. E
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9
Transactions of the Institute of Electrical Engineering of Japan. E
124
1
Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata
A Measurement Method for the Power Generation Characteristics of Piezoelectric Elements
2
The Deposition of a-C:H Films by Pulsed Laser Ablation
4
Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling
Microfabrication Technology for Millimeter-Wave Photonic Systems on Si
Micro-Analysis System for Glucose with an Electrochemically Actuated Sampling Mechanism
5
Dielectric breakdown mechanism of Hf -silicate high-k gate dielectrics.
A consideration for the evalation of MEMS devices low stress packaging using Piezo-resistive pressure sensor elements.
A new speedometer design for a vehicle using k-band Doppler sensor.
Development of pressure sensors for high temperature operation.
6
A Three-Dimensional Magnetic Field Measurement for Magnetoencephalogram
Low Temperature Preparation of Functional Oxide Thin Film by Sol-gel-Hydrothermal Process-Application to Si ULSI Monolithic Process for Large-Scale Integrated Sensor, Actuator, and Memory-
Field Emission Electron and its Applications
MEMS Variable Optical Attenuator using Asymmetricaly Driven Parallel Plate Tilt Mirror
A Cylindrical Capacitance Sensor with Three Electrodes for Liquid-Level Measurement in Two Different Conditions
7
Kansei Biosensor and IT Society
Micro-Hall Devices for Scanning Hall Probe Microscopy
International Standardization of Sensors and Micromachines
Development of High TCR Platinum Thin Films
Arrayed AFM Probes for Parallel Lithography
8
MEMS Technologies for Ubiquitous Computing World: Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroactive Polymers
MEMS Technologies for Ubiquitous Computing World: Study on Voice Recognition Utilizing Bone-Conducted Voice
MEMS Technologies for Ubiquitous Computing World: Electromagnetic Micro Actuator using Micro Coils for Hard Disk Drives
Micro Device for Local Temperature Control under Microscope
Multi-Information Monitoring of Engine Oil Degradation Using a Single Optical Sensor System
9
Development of Novel Coupling Method for Biochemical IC Family and Micro Chemical Devices
Material Discrimination by Means of Multifunctional Touch-Sensor Based on Piezoelectric Ceramics
Generation of Random Numbers by Micromechanism
Study of Bad-Smell Sensing Using Gas Detector Tube
A CAD-based Vision System using an ID-Tag and the Networ
Development of a Microsensor for Measurement of Concentrations of Single Drop Solutions
10
Polymer-MEMS and Its Applications
Fabrication of Movable Mirror-Array Structure Using Hot-Embossing for Optical Switch Applications
Three Dimensional Micro Fabrication of Photoresist and Resin Materials by Using Gray-scale Lithography and Molding
Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure
A Surface Movement Aircraft Passage Sensor Using a GPS Receiver and an Accelerometer
Ku-Band Silicon Passive Devices Fabricated by Dielectric-Air-Metal (DAM) Cavity Process
Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel)
Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding
11
Amperometric Gas Sensor Using Gas Diffusion Membrane Consisting of Carbon Powder and Fluorocarbon
Discrimination of Mixed Taste Solutions using Ultrasonic Wave and Soft Computing
The Discrimination Between Water and Oil Using Ultrasonic Sensor
Improvement of the Gas Selectivity of Semiconductor Thin-Film Gas Sensors
Sensing Performances of Mixed-Potential Type NOx Sensor Using Metal-Oxide Electrode
A Non-contact Multifunctional Sensor for Level and Concentration Measurement of Solution
12
Precision Measurement of Positioning on the Desktop Microrobot Factory-Towards Production System for Nanotechnology-
Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope
An Ultrasound Catheter using LIB phenomenon
Absolute and Noncontact Type Displacement Sensor using Transmission Line for Detecting Multiple Targets
Statistical Analysis of Plant Bioelectric Potential for Communication with Humans
Study on a Gas Sensor with Low Power Consumption Using Microbridge Structure
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