| Accession number;04A0697561 |
| Title;Spectroscopic and Electric Analysis of the Carbon Plume in an N2 Gas RF Plasma-assisted PLD |
| Author;SAKURA NOBUKAZU(Hokkaido Univ.) BRATESCU M A(Hokkaido Univ.) SAKAI YOSUKE(Hokkaido Univ.) SUGAWARA HIROTAKE(Hokkaido Univ.) SUDA YOSHIYUKI(Hokkaido Univ.) |
Journal Title;Papers of Technical Meeting on Electrical Discharges, IEE Japan
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Journal Code:Z0911A
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ISSN:
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VOL.ED-04;NO.65-72.74-75;PAGE.7-12(2004)
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| Figure&Table&Reference;FIG.13, TBL.3, REF.10 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;We investigated a carbon plasma plume generated by laser ablation of a graphite target in nitrogen gas environment. The spatial distributions of the relative densities of CN radical, and C2 and C3 molecules were measured using time-resolved emission spectroscopy. It was observed that application of RF plasma to the plume increased the CN radical and C atom densities and decreased the C2 molecule densities. In addition, we measured the electron density in vacuum and nitrogen gas environment by using a Langmuir probe. The thin films produced in RF plasma-assisted and non-assisted PLD were characterized by ellipsometry and Raman spectroscopy. (author abst.) |
