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Synthesis of Crystalline Carbon Nitride Thin Films by Electron Cyclotron Resonance(ECR) Sputtering Method.

Accession number;00A0840426

Title;Synthesis of Crystalline Carbon Nitride Thin Films by Electron Cyclotron Resonance(ECR) Sputtering Method.

Author;AOI Y(Ryukoku Univ., Otsu, Jpn) TANI Y(Ryukoku Univ., Otsu, Jpn) TAMAOKA K(Ryukoku Univ., Otsu, Jpn) HIRAHARA T(Ryukoku Univ., Otsu, Jpn) HISA M(Ryukoku Univ., Otsu, Jpn) KAMIJO E(Ryukoku Univ., Otsu, Jpn)

Journal Title;New Diam Front Carbon Technol

Journal Code:L1952A

ISSN:1344-9931

VOL.10;NO.4;PAGE.213-223(2000)

Figure&Table&Reference;FIG.10, TBL.2, REF.24

Pub. Country;Japan

Language;English

Abstract;